InvenSense 6-Axis Surface Mount Accelerometer & Gyroscope, LGA, I2C, SPI, 14-Pin

The InvenSense ICM series is a 6-axis motion tracking device for automotive applications that combines a 3-axis gyroscope and a 3-axis accelerometer. The gyroscope supports eight programmable full-scale range settings from ±15.625dps to ±2000dps, and the accelerometer supports four programmable full-scale range settings from ±2g to ±16g. It also features a 2 KB FIFO that can lower the traffic on the serial bus interface.

On-chip 16-bit ADCs and programmable filters
Digital-output temperature sensor
MEMS structure hermetically sealed and bonded at wafer level